Silicon nitride ceramics play various important roles in the semiconductor industry:

Insulation material: Silicon nitride ceramics have excellent insulation properties and can be used as insulation or isolation layers in semiconductor devices. In the manufacturing process of integrated circuits, the insulation layer plays a role in isolating electronic components, preventing unexpected current conduction, and thus improving the performance and reliability of the device.

Substrate material: In some special semiconductor growth processes, such as silicon carbide (SiC) epitaxial growth, silicon nitride ceramics can be used as a substrate material. The selection of substrate materials is crucial for the growth and performance of crystals, and silicon nitride ceramics have suitable crystal structure and chemical properties, which can promote the growth and quality control of silicon carbide crystals.

Packaging materials: Silicon nitride ceramics can also be used as packaging materials for packaging semiconductor chips and devices. It has good heat resistance and chemical stability, which can protect the chip from external environmental influences and provide good insulation performance, helping to prevent electromagnetic interference and electrical faults of the device.

Substrate material: In some special applications, silicon nitride ceramics can also be used as substrate materials for semiconductor devices. Although silicon nitride ceramics have slightly lower thermal conductivity compared to aluminum nitride ceramics, their excellent chemical stability and mechanical strength make them a choice in some specific application scenarios.