ULE Corning Low Expansion Glass Processing

Q:

ULE low expansion glass is made from a precise mixture of silica, dopants, modifiers, rare earth elements and reducing agents. Silicon dioxide forms its basis, providing thermal stability and a low coefficient of thermal expansion. Dopants and modifiers such as titanium and zirconia enhance strength, while rare earth elements optimize optical properties. Reducing agents ensure purity throughout the manufacturing process. This complex composition gives glass excellent thermal stability, optical transparency and mechanical elasticity, making it an indispensable material for various industries.

Q:

ULE®

Zero expansion titanium dioxide silicate glass 7972

Special attribute

Ultra-low thermal expansion

Very resistant to high temperature shock

High operating temperature

Available in large sizes

Amorphous, amorphous glass (excluding ceramics)

Typical application

Low expansion glass substrate

Length standard

Lightweight honeycomb frame

Glass ruler for CNC machine tools

Strong and lightweight mirror blank

Astronomical telescope

Precision measurement technique

Satellite applications in space

Laser cavity

Precision gyroscope

Q:

One of the main differences between ULE glass and Macor glass is their thermal expansion properties. ULE glass has an ultra-low coefficient of thermal expansion, which ensures minimal dimensional variation under thermal stress, while Macor has a higher coefficient of thermal expansion, which can result in greater dimensional variation.

In addition, Macor's machinability sets it apart from ULE glass, giving artisans greater flexibility in the molding and detailing of ceramic parts. However, ULE glass is superior to Macor in terms of optical transparency and chemical resistance, making it the first choice for applications that require transparency and durability.

All in all, the difference between ULE glass and Macor glass lies mainly in their thermal expansion properties and machinability. ULE glass excels in thermal stability and optical transparency, while Macor offers superior machinability and mechanical strength.

Q:

Corning® ULE® Glass (Ultra-low expansion glass) 7972 is a titanium dioxide silicate glass with near zero expansion properties, making it the material of choice for unique applications such as machine tool reference blocks, gratings, reference blocks, interferometer reference mirrors, to telescope mirrors.

ULE is a single-phase supercooled liquid with a CTE very close to 0 ppb/K.

The EUV ULE 7973 is tailored to meet the needs of EUVL application masks and optical substrates.

The lithographic transition from 193nm to 13.4nm required a major design shift from refraction to reflection in stepping optics. In reflective optics, the base material should be purely passive. The incident light should be reflected from the multilayer coating of the optical device and the photomask without introducing any mechanical or optical distortion caused by the substrate below.

To minimize deformation due to small temperature changes and meet strict EUVL specifications, the substrate must have a near-zero coefficient of thermal expansion (CTE) and a low peaking and valley (PV) CTE variation. Very low CTE requirements are measured in parts per billion Kelvin (ppb/K).