Silicon Carbide (SiC) Electrostatic Chuck

Silicon carbide (SiC) electrostatic chucks fix wafers through electrostatic adsorption, achieving stable fixation without mechanical clamping. They are often used in semiconductor equipment:

Dry etching machines, PVD/CVD chambers, ion implantation equipment

Fixation of 200mm/300mm wafers

Chemical vapor deposition/physical vapor deposition

Photolithography