Equipment and instrument calibration measurement

This section introduces calibration settings, materials used, and calibration results using general polynomial methods. In order to calibrate the multi-point measurement system, the light source is moved meandering to M measurement points in the object space. NPMM-200 is used for mobile light sources.

Nanometer measurement positioning machine NPMM-200

The NPMM-200 consists of a three-axis positioning system with precision guides and actuators. It is designed based on the so-called sample scanning mode, in which the object to be measured, rather than the measuring sensor, moves. The position of the movable measurement object carrier is determined by three interferometers. The arrangement of the interferometer ensures that the virtual intersection point of its beam is fixed spatially at the contact point of the measuring sensor. The movable measurement object carrier has three high-precision measurement reflective surfaces [? 20], on which the interferometer beam is reflected. Figure 6 shows the measurement object carrier and measurement framework of NPMM-200.