Why NEXCERA Is Replacing Zerodur in Semiconductor Equipment

Recently, an increasing number of semiconductor equipment manufacturers have started to pay attention to NEXCERA, and in many cases it is being used to replace components originally made from Zerodur. We believe the reason goes beyond just the coefficient of thermal expansion—since both materials already have CTE values that are close to zero.

The real difference lies in how these materials perform under dynamic conditions.

NEXCERA, developed by Krosaki Harima Corporation, is a polycrystalline ceramic, whereas Zerodur from SCHOTT AG is a glass-ceramic. This structural difference directly affects stiffness and vibration characteristics.

In semiconductor applications, Zerodur is an excellent material for static optical systems. However, in high-speed motion systems, its relatively low specific stiffness can introduce micro-vibrations, leading to longer settling times and reduced efficiency. In contrast, NEXCERA offers more than 1.5× the stiffness of Zerodur while maintaining a comparable CTE.

This is the primary reason why NEXCERA is attracting semiconductor equipment manufacturers. That said, this does not mean Zerodur is outdated—it simply reflects that performance requirements are shifting toward high-speed, high-dynamic systems.

Key Performance Comparison Table

To help you better understand why NEXCERA is increasingly being used as an alternative to Zerodur in semiconductor devices, the table below compares the key properties of the two materials.

Of course, many semiconductor devices still use Zerodur as their preferred material. Material selection is never about "the more expensive the better" or "the higher the performance, the better," but rather requires a choice based on needs, cost, and risk.

Cost and Machining Efficiency Comparison

In terms of practical machining and cost, Zerodur is relatively easier to process. Although the raw material cost is high, the manufacturing process is well-established thanks to years of development by SCHOTT AG.

In contrast, NEXCERA is significantly more expensive, and its supply is relatively limited due to its production by Krosaki Harima Corporation. Adopting this material often requires additional efforts in validation, lifetime testing, and system-level adjustments.

However, from my perspective, in high-end semiconductor applications where dynamic performance and precision are critical, these additional costs and efforts can be justified by the performance gains.

This is especially true for next-generation equipment, where faster response, reduced vibration, and higher positioning accuracy directly translate into improved throughput and process stability.

Ultimately, material selection is only part of the equation — the ability to machine these materials into high-precision components is equally critical.

We have extensive experience in precision machining of ultra-low expansion materials, including NEXCERA and Zerodur, supporting customers in semiconductor, optical, and advanced engineering applications.

By combining material expertise with advanced machining capabilities, we help translate material properties into real-world performance.