Low-thermal-expansion-cordierite
Low Thermal ExpansionDimensional stability

NEXCERA Low Thermal Expansion Cordierite

NEXCERA is a low thermal expansion cordierite ceramic designed for applications requiring excellent dimensional stability under temperature changes. With an extremely low coefficient of thermal expansion, it helps minimize thermal deformation and maintain precision in demanding optical, semiconductor, metrology, and high-temperature applications

Machining Capability

Jundro specializes in the precision machining of ultra-low thermal expansion cordierite, providing customized components for semiconductor manufacturing equipment, precision optical systems, coordinate measuring machines (CMMs), telescopes, and other high-precision applications.Based on customer drawings, we can machine cordierite substrates, blocks, mirror blanks, and complex structural components, including custom profiles, mounting holes, positioning holes, slots, curved surfaces, and other intricate features. Precision grinding, polishing, and optical-grade finishing are also available.

Low-expansion-cordierite-mirror
Tolerance ±1um
Flatness 1 µm (Φ300)
Roughness Ra0.01μm
Micropores 0.1mm
Parallelism 1 µm
Max. Size Φ500mm

Advantages

  • Extremely low coefficient of thermal expansion (CTE) at room temperature, approaching zero expansion、
  • Higher rigidity and lower weight compared to Zerodur
  • Non-porous structure, suitable for mirror-quality polishing
  • Supports machining of complex shapes
  • Chemical corrosion resistance
  • Excellent dimensional stability

Properties

The table below lists the property parameters of ultra-low thermal expansion cordierite ceramics. These values ​​are for reference only and may vary slightly depending on batch conditions.

Part Number N113B N117B N118C N119C CD107
Color black black blue-grey light
blue-grey
blue-grey
Bulk Density g/cm³ 2.5 2.55 2.58 2.5 2.57
Flexural Strength MPa 210 230 220 166 230
Young's Modulus GPa 130 140 140 130 143
Specific Stiffness GPa/(g/cm³) 52 55 54 52 55
Fracture Toughness MPa・m¹ᐟ² 1.2 1.2 1.4 1.3 1.4
Hardness GPa 8.0 8.1 8.1 8.0 -
Coefficient of Thermal Expansion X10⁻⁶/℃ 23℃ < 0.03 < 0.03 < 0.05 < 0.05 < 0.03
(Measured at 22℃)
Thermal Conductivity W/mK 3.7 4.2 4.5 4.3 4.7
Relative Permittivity (1MHz) 4.7 6.0 4.7 4.4 4.6

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Applications-of-Low-Expansion-Cordierite

Applications

  • EUV/DUV lithography machines
  • Optical mirrors
  • Vacuum chucks
  • Alignment stages
  • Electrostatic chucks, electric vacuum chucks
  • Precision optical systems
  • Ultra-stable optical cavity spacers
  • Satellite optical telescopes

Cases

FAQS

What is NEXCERA low thermal expansion cordierite?
NEXCERA is an ultra-low thermal expansion cordierite ceramic with near-zero thermal expansion and excellent dimensional stability.
What is the CTE of NEXCERA cordierite?
Its coefficient of thermal expansion can be as low as approximately 0 ± 0.02 × 10⁻⁶/K at 20–300°C.

Can NEXCERA cordierite be precision machined?

Yes. Jundro provides precision machining of NEXCERA cordierite, including grinding, polishing, drilling, slots, holes, and complex profiles.

What applications use NEXCERA cordierite?
It is suitable for semiconductor equipment, precision optics, CMMs, telescopes, optical measurement systems, and other high-precision applications.
Can NEXCERA replace microcrystalline glass?
NEXCERA can serve as an alternative to certain microcrystalline glass and low-expansion glass-ceramic components where ultra-low thermal expansion and dimensional stability are required.

Macor is a machinable glass-ceramic made from fluorophlogopite mica crystals embedded in a borosilicate glass matrix. This composition gives it a rare
combination of metal-like machinability, excellent electrical insulation, low thermal conductivity, and stability up to 1000°C (no load) while maintaining very tight tolerances.